Chemistry of Atomic Layer Deposition

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes.\n\nThe underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface. Additional ISBNs 9783110712537Chemistry of Atomic Layer Deposition 1st Edition is written by Se�n Thomas Barry and published by De Gruyter. ISBNs for Chemistry of Atomic Layer Deposition are 9783110712599, 3110712598 and the print ISBNs are 9783110712513, 3110712512. Additional ISBNs include 9783110712537.